標準型隔振器

Standard Vibration Isolator

Industry-standard pneumatic isolation for heavy payloads, fast settling, and stable metrology performance.

Features

  • Dual Chamber Damping System
  • Integrated Internal Oil Damper for Moving Stages
  • High-Precision Leveling for Higher Stability
  • Air Operated Valve for Faster Settling Time

Product Specifications

產品規格

Specifications
Isolation System Pneumatic Vibration Isolation System
Damping Mechanism Dual Chamber (Air/Damping) with Orifice
Load Capacity 400 kg – 45,00 kg
Natural Frequency 2.5 Hz – 4.0 Hz
Vibration Isolation at 10 Hz 80% – 90%
Leveling Repeatability Standard Leveling Valve ±1.0 mm, Precision Leveling Valve ±0.05 mm
Optional Upgrades Internal Oil Damper, Air-Operated Valve