主動式隔振系統

Active Vibration Isolation System

High-performance active isolation platform designed specifically for electron microscopy and ultra-high-resolution imaging applications.

  • 6-DOF active vibration control
  • Isolation bandwidth from 0.5–200 Hz
  • Response time below 0.5 ms
  • Feedback and feedforward control technology
  • Electromagnetic actuator design
  • Customizable dimensions and payload capacity
  • Real-time vibration monitoring and data recording

Case Studies

Product Specifications

產品規格

Model DVIA-ML1000 DVIA-ML3000 DVIA-ML6000
Payload Capacity Options Customizable
Maximum Load Capacity 1700kg 3000kg 6000kg
Vibration Isolation Technology Feedback and Feedforward Control
Degrees of Freedom 6 (X, Y, Z, θx, θy, θz)
Active Isolation Bandwidth 0.5 – 200 Hz
Vibration Isolation 80 – 90% at 1 Hz
Actuator Electromagnetic Actuator
Maximum Actuator Force Vertical 40 N, Horizontal 20 N Vertical 40 N, Horizontal 20 N Vertical 80 N, Horizontal 40 N
Vibration Sensor Geophone, Sensitivity: 2.55 V/in/s (100.4 V/m/s) ± 10%
Leveling Repeatability Repeatability: ± 0.1 mm
Response Time < 0.5 ms
Controller Built-in
Environmental Protection CE and TUV
Power Requirements Line Voltage: 100 – 260V AC,

Line Frequency: 50/60 Hz

Line Voltage: 100 – 260V AC,

Line Frequency: 50/60 Hz

Line Voltage: 100 – 240V AC

(Single-phase),

Power: 100 W

Air Requirements Air Pressure: 4 – 6 bar,

Air Delivery: 10 L/min

Air Pressure: 4 – 6 bar,

Air Delivery: 10 L/min

Air Pressure: 5 – 6 bar,

Air Delivery: 250 L/min

Environmental Requirements Temperature: 5 – 50 °C, Humidity: 20 – 90 %

Click here to add your own text

Click here to add your own text

Click here to add your own text