高級隔振器

Advanced Vibration Isolator

High-performance pneumatic isolation system for precision metrology, ensuring fast settling and maximum accuracy.

Features

  • Dual Chamber Damping System
  • Gimbal Piston: True Omnidirectional Isolation
  • Superior Low-Frequency Isolation
  • Designed for Moving Stages
  • High-Precision Leveling for Higher Stability
  • Options
    • External Oil Damper
    • Air Operated Valve

Product Specifications

產品規格

Specifications
Isolation System Pneumatic Vibration Isolation System
Damping Mechanism Dual Chamber (Air/Damping) with Orifice
Load Capacity 500 kg – 6000 kg
Natural Frequency 1.3 Hz – 3.0 Hz
Vibration Isolation at 5 Hz 80% – 90%
Vibration Isolation at 10 Hz 90% – 99%
Leveling Repeatability Standard Leveling Valve ±1.0 mm, Precision Leveling Valve ±0.05 mm
Optional Upgrades External Oil Damper, Air-Operated Valve