Thermo Fisher SEM 專用隔震系統

Active Control Built for Thermo Fisher SEM

Custom-engineered for Thermo Fisher Scientific SEM

  • 6-DOF active vibration control
  • Isolation bandwidth from 0.5–200 Hz
  • Response time below 0.5 ms
  • Feedback and feedforward control technology
  • Electromagnetic actuator design
  • Customizable dimensions and payload capacity
  • Real-time vibration monitoring and data recording

Case Studies

Product Specifications

產品規格

Model DVIA-MLP1000
Dimensions 874 x 846 x 158 mm
Maximum Payload 1500 kg
Control Method Feedback and Feedforward Control
Degrees of Freedom 6 DOF (X, Y, Z, θx, θy, θz)
Active Bandwidth 0.5 – 200 Hz
Vibration Isolation 80 – 90% at 1 Hz
Actuator Force Electromagnetic · Vertical 40 N · Horizontal 20 N
Sensor Geophone · Sensitivity 2.55 V/in/s (100.4 V/m/s) ± 10%
Leveling Accuracy ± 0.1 mm
Controller External
Certifications CE · TÜV
Power Supply 100 – 260 V AC · 50/60 Hz
Air Supply 4 – 6 bar · 10 L/min
Operating Environment 5 – 50 °C · 20 – 90% RH